Abstract:Amorphous coatings, particular nitride systems, are of interest for numerous practical applications. Nevertheless, at present only a few amorphous nitride coating systems have been considered, the most notably being the (TM, Si)N system (transition metal (TM)=Ti, Zr, W, Mo). The present study provides an alternative approach for producing amorphous nitride films with high thermal stability up to 700°C for 2h. Films are deposited from an equimolar AlBCrSiTi target in various argon/nitrogen atmospheres at different substrate temperatures. It is found that above the nitrogen flow ratio (i.e. RN=N2/N2+Ar) of 28.6% a near equal ratio between target elements and nitrogen is approached, thus indicating the coatings have the chemical formula of (AlBCrSiTi)N. The glancing-angle X-ray diffractometer and transmission electron microscope investigations indicate that the coatings, regardless of nitrogen concentration or deposition temperature (up to 500°C), are amorphous. Thermal treatment shows that the amorphous structure of this (AlBCrSiTi)N coating is maintained up to 700°C when annealing for 2h in vacuum. At annealing temperatures of 800°C and above, the amorphous films transform into a simple NaCl-type face-centered cubic solid solution. Even after annealing at 1000°C for 2h, the grain size is only 2nm. High entropy effect, large lattice distortion effect, and sluggish diffusion effect are proposed to account for the formation of amorphous nitrides.

Inhibition of grain coarsening up to 1000°C in (AlCrNbSiTiV)N superhard coatings

Effects of Substrate Temperature and Post-Annealing on Microstructure and Properties of (alcrnbsitiv)n Coatings

Strong Amorphization of High-Entropy AlBCrSiTi Nitride Film

Structure and Properties of Two Al–Cr–Nb–Si–Ti High-Entropy Nitride Coatings

Structure and Thermomechanical Properties of Superlattice-Stabilized TiNbTaZrSiAlN High-Entropy Coating

Hardening mechanism and plastic deformation behavior in super-hard AlCrNbSiTiN high-entropy nitride nanocomposite coatings

Effects of Annealing Temperature on the Microstructure and Hardness of TiAlSiN Hard Coatings

Structural and Mechanical Properties of Multi-Element (alcrmotatizr)nx Coatings by Reactive Magnetron Sputtering

Effects of Carbon Content and Annealing Temperature on the Microstructure and Hardness of Super Hard Ti–Si–C–N Nanocomposite Coatings Prepared by Pulsed D.c. PCVD

Effects of Substrate Bias on Structure and Mechanical Properties of (alcrnbsitiv)n Coatings

Machining Performance of Sputter-Deposited (al0.34cr0.22nb0.11si0.11ti0.22)50n50 High-Entropy Nitride Coatings

Thermally Activated Relaxation Processes in Superhard Nc-Tin/a-sin and Nc-(Tial)n/a-sin Nanocomposites Studied by Means of Internal Friction Measurements

Thermal stability of Ti-Si-N super hard nanocomposite coatings

Thermal-induced decomposition and mechanical properties of AlN/CrN superlattice coating

Effects of the carbon-to-nitrogen ratio on the microstructure and properties of (CrNbSiTiZr)CxNy high-entropy carbonitride films

Hard Yet Tough Thermodynamics-Driven Nanostructured (alcrnbsixti)n Multicomponent Nitride Hard Coating

Microstructure, Mechanical Properties, Wear and Erosion Performance of a Novel High Entropy Nitride (AlCrTiMoV)N Coating Produced by Cathodic Arc Evaporation

Mechanical behavior, tribological properties, and thermal stability of (AlCrNbSiTiVZr)N high entropy alloy nitride coatings and their application to Inconel 718 milling

Structure, Composition and Mechanical Properties of Reactively Sputtered (tivcrtaw)nx High-Entropy Films

Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films

Effect of bias voltages on microstructure and mechanical properties of (AlCrNbSiTi)N high entropy alloy nitride coatings deposited by arc ion plating