Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films

Panpan Cui,Wei Li,Ping Liu,Ke Zhang,Fengcang Ma,Xiaohong Chen,Rui Feng,Peter K. Liaw
DOI: https://doi.org/10.1016/j.jallcom.2020.155063
IF: 6.2
2020-09-01
Journal of Alloys and Compounds
Abstract:<p>The (AlCrTiZrHf)N high-entropy alloy nitride films were synthesized by reactive magnetron sputtering. The effects of different N<sub>2</sub> flow rates on the microstructures and mechanical properties of (AlCrTiZrHf)N films were studied by the X-ray diffraction (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), nanoindentation, coating friction and wear tester. The results show that the AlCrTiZrHf high-entropy alloy film presents an amorphous state. With the increase of the N<sub>2</sub> flow rate, the (AlCrTiZrHf)N high-entropy alloy nitride films transform to a face-centered-cubic (FCC) structure. When the N<sub>2</sub>:Ar ratio is 5:4, the hardness and elastic modulus of the films reach 33.1 GPa and 347.3 GPa, respectively. The strengthening effect is mainly attributed to the formation of saturated metal-nitride phases and the solid-solution strengthening of various elements. Meanwhile, the (AlCrTiZrHf)N film exhibits the low friction coefficient and superior wear resistance. Based on the excellent properties of high-entropy alloy nitride films, the (AlCrTiZrHf)N film presents a potential application in protective coating.</p>
materials science, multidisciplinary,chemistry, physical,metallurgy & metallurgical engineering
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