Characterization of defect type and dislocation density in double oxide heteroepitaxial CeO 2 /YSZ/Si(001) films

C.H. Chen,T. Kiguchi,A. Saiki,N. Wakiya,K. Shinozaki,N. Mizutani
DOI: https://doi.org/10.1007/s00339-002-1951-1
2003-01-01
Applied Physics A
Abstract:. In order to qualitatively and quantitatively analyze the structural defects including the defect types and their concentrations in oxide heteroepitaxial films, a new X-ray rocking-curve width-fitting method was used in the case of doubleCeO 2 /YSZ/Si (YSZ=yttria-stabilized ZrO 2 ) films that were prepared by pulsed laser deposition. Two main defect types, angular rotation and oriented curvature, were found in both CeO 2 and YSZ. Dislocation densities of CeO 2 and YSZ, which were obtained from the angular rotations, are functions of the YSZ thickness. A distinct two-step correlation between dislocation densities of CeO 2 and YSZ was found that as the dislocation density of YSZ is higher than 2.4×10 11 cm -2 , the dislocation density of CeO 2 shows a high sensitivity with that of YSZ compared with the low relativity in lower dislocation density (<2.4×10 11 cm -2 ). In addition, YSZ always has higher dislocation densities and oriented curvatures than CeO 2 in each specimen, which can be attributed to the smaller mosaic domain sizes in YSZ than in CeO 2 as observed by high-resolution transmission electron microscopy.
What problem does this paper attempt to address?