Potassium-promoted Oxidation of Β-Sic

MS Ma,MR Ji,WW Cai,JX Wu,JS Zhu,XM Liu,BF Yang,PS He,BK Jin,YZ Ruan
DOI: https://doi.org/10.1103/physrevb.56.4913
IF: 3.7
1997-01-01
Physical Review B
Abstract:An investigation of potassium-promoted oxidation of beta-SiC has been performed by means of x-ray photoelectron spectroscopy, ultraviolet photoelectron spectroscopy, and the work-function change measured from the shift of the slow secondary-electron cutoff in the ultraviolet photoemission, for different potassium coverages and substrate temperatures. It is shown that there exist saturations for both K-and Si-bonded oxygen after sufficient oxygen doses at room temperature no matter what the coverage of the alkali metal, while there exists a saturation only for the K-bonded oxygen even after a much higher exposure at the elevated temperature of 500 K than that required for the saturation at RT; the oxygen bonded to the catalyst is in the state of O-2(2-) at room temperature, and it converts to O2- ion at 500 K; the existence of silicon suboxides SiOx (x<2) is proved for substrate temperatures lower than 500 K, and they convert to SiO2 at 700 K in an oxygen diffusion-controlled way.
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