Scaling capability and design guidelines of a nano-scale quasi-SOI device for low operation power and high-performance applications

Yu Tian,Ru Huang,Xing Zhang,Yangyuan Wang
DOI: https://doi.org/10.1088/0268-1242/21/4/010
IF: 2.048
2006-01-01
Semiconductor Science and Technology
Abstract:A new nano-scaled device structure named a quasi-SOT MOSFET is developed for CMOS scaling towards a 25 nm gate length and beyond. The scaling capability and design guidelines of the quasi-SOI MOSFET are comprehensively investigated in this paper. A comparison of physical parameter limitations between the ultrathin body (UTB) SOI MOSFET and the quasi-SOI MOSFET is demonstrated. With careful optimization of device geometry, the specifications with a 25 nm physical gate length for low-operating power (LOP) and high-performance (HP) logic applications can be satisfied by the quasi-SOI MOSFET. The optimal regions for LOP and HP applications are given in this paper, which shed light on the quasi-SOI MOSFET design. Finally, the sensitivity of the nano-scaled quasi-SOI MOSFET and UTB SOI MOSFET to the device parameter fluctuations induced by fabrication variations is discussed.
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