Computer simulation and experiment for surflace roughness measurement using speckle images

Xue-zeng ZHAO,Zhao GAO
DOI: https://doi.org/10.3321/j.issn:1002-1582.2009.02.007
2009-01-01
Optical Technique
Abstract:The near-field diffraction equation for rough surfaces is derived from the Fresnel-Kirchhoff diffraction formula.Through the analysis of statistical properties of the speckle intensity distribution,the specular intensity component method for surface roughness measurement is proposed.To verify the availability of the measuring method,a series of randomly rough surfaces with prescribed statistical properties are generated using computer simulation,and then the speckle fields and the intensity distributions in the observation plane are calculated.Comparisons with the traditional speckle contrast method indicate that the specular intensity component method has wider measuring range and better measurement precision than the average contrast method does for a slightly rough surface roughness measurement.Besides,this method overcomes the disadvantage that the traditional speckle contrast method is sensitive to the surface lateral correlation length.An experiment is conducted to confirm the results of computer simulation.
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