Preparation and Application of Electrodes Used for the Tool of Micro-electrochemical Machining

WANG Ming-huan,ZHU Di,WANG Lei,ZHANG Zhao-yang
2007-01-01
Abstract:Preparation of micro-electrode and control of the machining process are the key problems in electrochemical micro-machining(EMM).The research results of the fabriacation of micro-electrodes and their application in three-dimension structures with high prcision was introduced.Electrochemical etching was applied to prepare the micro-electrodes and their diameter was controlled by means of measuring the variation of ohmic resistance in circuit.The micro-electrodes with diameters from 3 μm to 20 μm and the micro electrodes array with diameters of 40 μm were prepared by the method.Based on the preparing of micro-electrodes,the micro-holes and micro-gaps were fabricated by using narrow gap and pulse processing in EMM and the micro-holes with diameters of 110 μm and micro-gaps with width of 20 μm were obtained.
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