Research on a Micro EDM Equipment and Its Application
Wan Sheng Zhao,Y. Zhang,Zhen Long Wang,B. X. Jia,Fu Qiang Hu,Z. Y. Li
DOI: https://doi.org/10.4028/www.scientific.net/KEM.259-260.567
2004-01-01
Abstract:A micro electro discharge machining (EDM) equipment is developed in this paper. It includes granite basement which can decrease stray capacitance, precise servo mechanism, precise high speed rotary spindle, a RC-pulse generator used by micro EDM, machining states detecting system and machining process control system. In addition to these, a new type of wire electro discharge grinding (WEDG) unit is designed and set up in this equipment. The CNC interpolation for the 3 axes linkage movement can be realized easily on this equipment. Therefore, micro shaft, micro hole, and 3D microstructure can be machined easily by using this equipment. The relationship between rotating speed of spindle or dielectric and the machining efficiency or the relative electrode wear rate is researched through machining experiments. Experiments show that the microelectrode diameter as small as 12 mum and the micro hole with minimum size of 25 mum could be obtained steadily, and the maximum aspect ratios of microelectrode and micro hole are over 25 and 10 respectively. At last, a complicated 3D microstructure is machined by using this equipment and micro-EDM technology.