Fabrication and Field Emission Characteristics of LaB6 Field-Emitter Arrays

Xiaoju Wang,Yadong Jiang,Zulun Lin,Kangcheng Qi,Benlian Wang
DOI: https://doi.org/10.1088/0022-3727/42/5/055409
2009-01-01
Abstract:Lanthanum hexaboride field-emitter arrays(LaB6 FEAs) with tip structures are fabricated by oxygen plasma oxidation-etching method. The field emission characteristics are studied in a conventional diode test cell in vacuum system. LaB6-FEAs exhibit a much lower turn-on field of 7 V·μm-1 due to its lower work function of 2.6 eV. The Fower-Nordheim plot obtained from the current-voltage characteristic is found to be nearly linear in accordance with the quantum mechanical tunneling phenomenon. In addition, oxygen plasma oxidation-etching method is also compared with argon-oxygen plasma etching method and electro-chemical etching method, which indicates that oxygen plasma oxidation-etching method is a very promising fabrication technique for the preparation of LaB6-FEAs.
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