Electron Emission Characteristics of Al–AlN Granular Films

H. F. Liang,C. L. Liu,Z. H. Liang,L. G. Meng
DOI: https://doi.org/10.1016/j.apsusc.2008.04.105
IF: 6.7
2008-01-01
Applied Surface Science
Abstract:An electron conduction emitter of Al–AlN granular films was proposed for surface conduction electron emission device in this paper. The Al–AlN granular films with thickness of 30nm were prepared between two co-planar electrodes with gap of 10μm by magnetron sputtering. After electroforming the Al–AlN granular films, the films’ structure could be recovered by applying the periodic device voltage (Vf). Stable and uniform electron emission was observed with turn-on voltage of 5.3V and threshold voltage of 9V. The emitter emission current (Ie) of 4.84μA for 36 cells was obtained with the anode voltage of 2.5kV and the device voltage of 12V. In addition, Fowler–Nordheim plots for Ie–Vf properties showed that the electron emission mechanism should be field emission.
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