Development and Characterization of Flexible Parylene-based Neural Microelectrodes

LI Bo,HUI Chun,XU Ai-lan,XING Yu-mei,REN Qiu-shi
DOI: https://doi.org/10.3969/j.issn.1000-9787.2007.10.033
2007-01-01
Abstract:Substrate-integrated electrodes are the key components in implantable microsystems for recording of neural signals or electrical stimulation of nerves.A micro fabrication technique is introduced to fabricate multielectrode arrays based on a new flexible substrate—Parylene.The process technology for Parylene-based microelectrode arrays is described.Surface topography and electrical properties of the microelectrodes are characterized by optical microscope and electrochemical method.The result indicates that in the working frequeney(104~105Hz),the impedance is low(400~1 000 Ω),and the phase angle is small(-20°),which is suit for the application of retinal renovation.
What problem does this paper attempt to address?