Abstract:High-precision neural recording plays a pivotal role in unraveling the intricate mechanisms that underlie information transmission of the nerve system, raising increasing interests on the development of implantable microelectrode arrays (MEAs). The challenge lies in providing truly soft, highly conductive and low-impedance neural interface for precise recording of electrophysiological signals of individual neurons or neural networks. Herein, by implementing a novel topological regulation strategy of silk fibroin (SF) crosslinking, we prepared a flexible, hydrophilic, and biocompatible MEAs substrate, facilitating biocompatible neural interface that minimizes mechanical mismatch with biological tissues. Additionally, we established a screen printing combined post-coating strategy to prepare MEAs with high conductivity, low impedance and high capacitance, by coating PEDOT: PSS on titanium carbide (Ti3C2) microarrays. Ti3C2 nanosheets as conductive phase of MEAs avoided the charge drifting of metals and facilitated MEAs processing. Further coating PEDOT: PSS on electrode points reduced the impedance of 100 times from 105 to 103 Ω. Experimental validation confirmed the superior electrophysiological signal recording capabilities of the SF-based MEAs (SMEA) in both peripheral and cerebral nerves with a much higher signal-to-noise ratio (SNR) of 20. Especially, we achieved high-precision recording of action potential (AP) induced by flash visual stimulation, whereas in most reports only local field potential (LFP) recording was realized, proving the high performance in weak signal recording. In summary, the development of SMEA provides a robust foundation for future investigations into the mechanisms and principles of neural circuit information transmission in complex nervous systems.

Key Design of Flexible Neural Microelectrode Arrays and Its Microfabrication Process

Development Of Flexible Neural Microelectode Arrays Based On Parylene For Retinal Prosthesis

[The Research on High-Density Flexible Microelectrode Array of Retinal Prosthesis Based on MEMS Technology].

Electrical Characterization of Flexible Neural Microelectrode Array for Retinal Prosthesis

Fabrication of Parylene-Based Flexible Microelectrode Arrays

Microfabrication of Multichannel Flexible Neural Microelectrodes

A novel 3D flexible parylene-metal structure fabrication technique

A Simple and Low-Cost Method to Fabricate Flexible Microelectrodes for Neural Applications

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Fabrication of Flexible 3D Microelectrode Aray with Parylene-Based Pattern Transfer Technique

Fabrication of a Flexible Three-Dimensional Neural Microelectrode Array

PDMS-Based Neural Microelectrode Arrays for Retinal Prosthesis

Development and Characterization of Flexible Parylene-based Neural Microelectrodes

Fabrication of Flexible Microelectrode Arrays Integrated with Microfluidic Channels for Stable Neural Interfaces

The fabrication and characteristic analysis of polyimide-based neural microelectrodes

Fabrication of dome-shaped flexible electrode arrays for retinal prostheses

Self‐Unfolding Flexible Microelectrode Arrays Based on Shape Memory Polymers

Progress In Research Of Flexible Mems Microelectrodes For Neural Interface

A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues