Study on Fabrication Method of Implantable and Flexible Double-side Microelectrodes for Neural Applications

ZHOU Hong-bo,LI Gang,JIN Qinghu,ZHAO Jian-long,REN Qiu-shi
2007-01-01
Abstract:To implement the minimal invasive implantation and improve the recording or stimulation resolution of neural microelectrodes, a method was proposed to fabricate the implantable and flexible double-side polymer-based microelectrodes for neural application. A photosensitive polyimide (Durimide 7510) was used as the substrate materials and a local adhesive bonding technology combined with the method of eroding the sacrifice layer by electrochemical etching was used to turn over the polyimide foil and fabricate of the back side of a flexible electrode. Simultaneously, a groove configuration based on the stress conglomeration was employed to ensure the regularity of the microelectrodes. The surface topographies and electrical properties of the microelectrodes were characterized by scanning electron microscopy and electrochemical method and the results show the topographies and properties of them can meet the conditions of implantable microelectrodes.
What problem does this paper attempt to address?