A Flexible Microneedle Electrode Array with Solid Silicon Needles

Renxin Wang,Wei Zhao,Wei Wang,Zhihong Li
DOI: https://doi.org/10.1109/jmems.2012.2203790
IF: 2.829
2012-01-01
Journal of Microelectromechanical Systems
Abstract:We propose a novel fabrication process to make flexible microneedle electrode array. The process includes creation of a silicon microneedle electrode array using a silicon-on-insulator substrate followed by its release using parylene films as the support material. The proposed structure provides flexibility of a parylene thin film and rigidity of a silicon structure. Using tissue-penetration tests and impedance spectroscopy, we demonstrate that such a structure is promising in invasive neural electrical stimulation and recording.
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