Electroplated microneedle array for biomedical applications

k k liu,z h du,f g tseng,minchieh chou,j y fang,c c chieng
DOI: https://doi.org/10.1117/12.418774
2001-01-01
Abstract:Ni/Co microneedle arrays, which are fabricated by conventional near UV lithography and chemical electroplating process on a silicon wafer, are reported here. These metallic microneedles with annular structure could be easily incorporated with micropump for drug delivery and in-situ physiological fluid sampling. The mechanical strength inherent in the alloy provides excellent durability for the needles to sustain in process and clinic test.
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