Encapsulation and Evaluation of a MEMS-Based Flexible Microelectrode Array for Acute In-Vivo Experiment

Xiaohong Sui,Fei Tan,Ting Liang,Wei Chen,Gang Li,Qiushi Ren
DOI: https://doi.org/10.1109/bmei.2009.5305136
2009-01-01
Abstract:A novel 16-channel flexible thin-film microelectrode array was fabricated and evaluated for epi-retinal electrical stimulation by MEMS (Micro ElectroMechanical System) processing techniques. It was encapsulated by medical-grade silicone adhesive and suitable for in-vivo application. In-vitro testing results showed that the average impedance of the microelectrode array was uniform at different steps of encapsulation, and the polyimide microelectrode had good biocompatibility with the glial cells. Proper surgery was adopted to implant the microelectrode in the epi-retinal location and the acute in-vivo testing results showed that the amplitude of electrical evoked cortical potential (EECP) could amount to 20 muV with the latency of 12 ms.
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