Mechanical Characterization of Nanostructures Using Nanobending-Based Test

XU Lin-yan,LI Da-chao,HU Xiao-tang,ZHANG Hai-xia,HUANG Yu-bo
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.048
2006-01-01
Abstract:Nanobending testing on silicon nitride nanobeams with different aspect ratios processed using focus iron beam technique is proceeded based on atomic force microscope (AFM). A simply method for calibrating the spring constant of the microcantilever of an AFM is discussed. The conditions for a slender Euler beam is strictly defined. On the basis of analyzing the influence of the aspect ratios of the nanobeam group on the testing results, the way to correcting the nanobending results is also discussed. The plate modulus is obtained in the experiment, and the Young’s modulus of the material of silicon nitride is abstracted further. The testing results verify the feasibility of the nanobending method for testing the Young’s modulus of nano film materials based on an AFM.
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