The calibration and test about nanomechanical test equipment

XiaoLin Wei,Sitian Gao,Hua Du,Mingzhen Lu,Yushu Shi
2009-01-01
Abstract:Nanoindentation has been widely used to evaluate and test material properties, we utilize the unloading curves of an indentation test to extract the hardness and reduced modulus of the material. As with most measured Systems, calibration is essential for limiting uncertainties and achieving repeatable measurements. The article emphasizes how to use fused quartz to calibrate the probe area function. In addition, measurements are taken at others different materials with the same area function calibrated on the fused quartz. Analysis results indicate that a universal area function may lead to a larger errors at small depth.
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