Nanohardness by Nanoindentation

M Li,SZ Wen,YG Meng
DOI: https://doi.org/10.3321/j.issn:1003-8728.2001.06.034
2001-01-01
Abstract:In a micro electromechanical system (MEMS) there are some elements that undergo elastic deformation under load to accomplish their functions, such as the beam in an acceleration sensor or the film in a micro-pump. The mechanical properties of solid materials are of interest as the mechanical properties have great effects on the operating performance of a micro electromechanical system. In this paper a new method, nano indentation, is introduced for the measurement of the mechanical properties of solid materials on the submicron scale and some experiments have been made on silicon which is widely used in elements fabrication of MEMS. The conclusion is that silicon has good mechanical properties at small load and they vary as the change of the depth of the indentation.
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