In situ study on bending modulus of Al2O3nanotubes prepared by atomic layer deposition

Dong-xiu SUNCHENG,Jin-yao MA,Li-zhen YANG,Qiang CHEN,Yue-fei ZHANG
DOI: https://doi.org/10.3969/j.issn.1000-6281.2018.01.001
2018-01-01
Abstract:Alumina nanotubes with precisely controllable thickness, composition and structures were prepared by atomic layer deposition and template method. Based on the SEM, TEM,SAED and EDS analysis results, we found what we obtained are the amorphous alumina nanotube structure whose film is dense without pinholes,with the deposition rate of 0.11 nm/cycle,and therefore the thickness of nanotubes can be controlled accurately at nanometer scale. Then we use self-designed SEM/SPM(scanning electron microscope / scanning probe microscope)combined test system to carry out the in-situ three-point bending experiments on alumina nanotubes. The results show that when the outer radius is about 50 nm,the young's modulus of the alumina nanotubes is in the range of 400 GPa to 600 Gpa and decreases with the increase of the wall thickness.
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