Abstract:The development of material science increasingly calls for rapid characterization methods with low limits of detection and high spatial resolution. Here we report a depth profile analysis method for thin layer coatings by combining low temperature plasma (LTP) probe with inductively coupled plasma mass spectrometry (ICP-MS). The LTP probe with diameter of several tens of micrometers served as a tool for mass removal, which is generated by the discharge in a quartz capillary at ambient condition. The sample material is ablated by the LTP probe and converted into an aerosol, and transported by a carrier gas flow to the ICP-MS, where the decomposed and ionized aerosol particles are analyzed with high sensitivity. Scanning electron microscope (SEM) micrographs reveal that the trace after ablation by the LTP probe is a hole with a diameter less than 10 microm. A lateral resolution of approximately 200 microm has been achieved by analyzing an electron component with interval metal stripes. Depth profiling of a 100 nm single layer sample and a multiple layer sample (100 nm Al/250 nm SiO(2)/100 nm Au/50 nm Cr) on a silicon substrate have been successfully performed at ambient condition. The present method offers unique advantages in terms of high spatial resolution, fast analysis speed and ease of implementation. It might be considered a complementary technique to existing depth profiling methods such as GD-MS/OES, AES, and SIMS. In addition, the simple-to-fabricate LTP probe is easily coupled to various other elemental analysis tools for thin layer or direct solid sample analysis in micro area.

Plasma Diagnosis for Microwave Ecr Plasma Enhanced Sputtering Deposition of Dlc Films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition

Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

Precise Characterization of Atomic-Scale Corrosion of Single Crystal Diamond in H2 Plasma Based on MEMS/NEMS

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

Application of x-ray energy dispersive spectroscopy to analyzing the thickness of diamond-like carbon film deposited on the surface of microparticles

Depth Profiling of Nanometer Coatings by Low Temperature Plasma Probe Combined with Inductively Coupled Plasma Mass Spectrometry.

Microstructure and Surface Properties of Chromium-Doped Diamond-Like Carbon Thin Films Fabricated by High Power Pulsed Magnetron Sputtering

Investigation on Preparation and Properties of Thick DLC Film in Medium-Frequency Dual-Magnetron Sputtering

A novel microwave plasma reactor with a unique structure for chemical vapor deposition of diamond films

Diagnostics of tin droplet-based laser produced plasma by triple Langmuir probe

Structure and Topographies of Diamond-Like Carbon Films Produced on Tungsten Pre-Implanted Stainless Steel Substrate by Plasma Immersion Ion Implantation and Deposition

Diamond‐like carbon films grown by a large‐scale direct current plasma chemical vapor deposition reactor: System design, film characteristics, and applications

Spectroscopic Study on the Evolution of Graphite Ablation Plume in ECR Argon Plasma During the Deposition of Diamond-Like Carbon Films

A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

Ion Energy Tuning for Enhanced sp3 Carbon Fraction in Electron Cyclotron Resonance Ion Beam Deposited Diamond-Like Carbon Coatings: a Computational and Experimental Approach

Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation

Diagnostics of CH/sub 4/ plasmas used for diamond-like carbon deposition

Plackett-Burman experimental design for pulsed-DC-plasma deposition of DLC coatings