Application of x-ray energy dispersive spectroscopy to analyzing the thickness of diamond-like carbon film deposited on the surface of microparticles

Junping Zhao,Zhengjie An,Zhijun Ai,Zhicheng Wu,Qiaogen Zhang

DOI: https://doi.org/10.1063/5.0180465

2024-09-01

Abstract:Depositing diamond-like carbon (DLC) film is considered to be more promising for surface modification of microparticles. The development of reliable and precise measurement techniques for DLC coatings on microparticles is crucial for advancing research in this field. This paper introduces a methodological approach for quantifying the thickness of the film on microparticles. The thickness of the film is obtained by establishing the quantitative relationship between the energy lost when electrons pass through the film and the thickness of the film. The proposed method allows for the estimation of film thickness by assessing solely the elemental abundance on the particle surfaces.