Abstract:As well-known,heteroepitaxial growth on sapphire is mainly employed to obtain optoelectronic(devices) because there is no suitable substrate matching with GaN.Therefore,the GaN layer suffers from a stress due to large difference in lattice constants and thermal expansion coefficients between the GaN and sapphire.To improve the quality of devices,the epitaxial lateral overgrowth(ELO) technique is applied to GaN.ELO-GaN on patterned SiO_2/GaN/α-Al_2O_3 substrate is grown by metalorganic chemical vapor deposition(MOCVD).First,a high quality 3 μm thick layer of GaN is grown by MOCVD.Next,standard deposition and photolithographic techniques are employed to prepare a set of parallel SiO_2 stripes oriented along a(〈11-00〉) GaN crystal direction separated by window areas which expose the underlying GaN.A second deposition of GaN onto this patterned substrate is then initiated.During the initial GaN growth,the SiO_2 stripes function as nonwettable surfaces and no GaN deposition occurs on them.However,once the GaN film growth from the window stripes reaches the tops of the SiO_2 stripes,epitaxial lateral overgrowth of GaN commences.The GaN thickness of the second step growth is about 10 μm.The results of a systematic study of the ELO-GaN on sapphire are reported.Atomic force microscopy(AFM) images showed that the surface of ELO-GaN is smooth and that there are linear-configuration hillocks in the middle of mask region,which are caused by the misorientation of crystalline when the ELO-GaN coalesce above the masks.The X-ray diffraction(XRD) curve revealed that the tilts in the(〈11-20〉) direction between GaN in window regions and mask regions are about 1.2°.Raman scattering spectrum revealed that the stress in the mask region is smaller than that in the window region and also the quality of GaN is much higher in the mask region.As a result,the quality of GaN crystalloid is effectively improved by MOCVD using the ELO technique.

Investigation of Characteristics of Laterally Overgrown GaN on Striped Sapphire Substrates Patterned by Wet Chemical Etching

Lateral Epitaxial Overgrowth of GaN Films on Patterned Sapphire Substrates Fabricated by Wet Chemical Etching

Fabrication of Patterned Sapphire Substrate by Wet Chemical Etching for Maskless Lateral Overgrowth of GaN

Investigation on the origin of crystallographic tilt in lateral epitaxial overgrown GaN using selective etching

Study of wing tilt in asymmetrically and laterally overgrowth of thick GaN films

Anisotropic structural characteristics of GaN templates and coalesced epitaxial lateral overgrown films deposited on sapphire

Influences of Mask Width, Fill Factor, HCl Addition and C Doping on Wing Tilts in the Epitaxial Laterally Overgrown GaN Films by Hydride Vapor Phase Epitaxy

Structural Characterization of Epitaxial Lateral Overgrowth GaN by MOCVD

Anisotropic Structural Characteristics of (112̄0) GaN Templates and Coalesced Epitaxial Lateral Overgrown Films Deposited on (101̄2) Sapphire

Impact of GaN Transition Layers in the Growth of GaN Epitaxial Layer on Silicon

Lateral Epitaxial Overgrowth of Fully Coalesced A-Plane Gan on R-Plane Sapphire

A Partly-Contacted Epitaxial Lateral Overgrowth Method Applied to GaN Material

Investigation of the Crystal Tilts in Laterally Epitaxial Overgrowth Gan Films Formed by Hydride Vapor Phase Epitaxy

Mechanisms of the Sidewall Facet Evolution in Lateral Epitaxial Overgrowth of Gan by Mocvd

Improvement in a -Plane GaN Crystalline Quality Using Wet Etching Method

Study on Nucleation and Growth Mode of GaN on Patterned Graphene by Epitaxial Lateral Overgrowth

Anisotropic Structural Characteristics Of (11(2)Over-Bar0) Gan Templates And Coalesced Epitaxial Lateral Overgrown Films Deposited On (10(1)Over-Bar2) Sapphire

Reduction of structural defects in a -plane GaN epitaxy by use of periodic hemispherical patterns in r -plane sapphire substrates

Microstructures of GaN Films Laterally Overgrown on Si(111) by Hydride Vapour Phase Epitaxy

Growth Behaviors of GaN on Stripes of Patterned c-Plane GaN Substrate

Dislocation Reduction in GaN on Sapphire by Epitaxial Lateral Overgrowth