Design And Fabrication Of Colloid-Based Vertical Nanoscale Devices

Aj Parker,Pa Childs,Re Palmer
DOI: https://doi.org/10.1016/S0167-9317(02)00442-2
IF: 2.3
2002-01-01
Microelectronic Engineering
Abstract:The design and fabrication of a vertical nanodevice with an active region based on gold colloidal nanoparticles deposited on a silicon nanopillar is presented. Devices are fabricated in parallel using natural lithography to create an array of silicon pillars. The nanoscale volume of the active region results from the combination of silicon pillar technology coupled with well controlled vertical processing. The results in this paper show the fabrication procedure at each stage, leading to a structure designed to demonstrate proof of principal of our approach. (C) 2002 Published by Elsevier Science B.V.
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