Fabrication of Ferromagnetic (ga,mn)as by Ion Irradiation

C. H. Chen,H. Niu,H. H. Hsieh,C. Y. Cheng,D. C. Yan,C. C. Chi,J. J. Kai,S. C. Wu
DOI: https://doi.org/10.1016/j.jmmm.2008.10.042
IF: 3.097
2009-01-01
Journal of Magnetism and Magnetic Materials
Abstract:Using Mn+ implantation following ion beam-induced epitaxial crystallization (IBIEC) annealing, high Curie temperature ferromagnetic (Ga,Mn)As thin film was fabricated. The crystalline quality of the Mn+ implanted layer was identified by X-ray diffraction (XRD) and transmission electron microscopy (TEM). A clear ferromagnetic transition at Tc 253K was observed by magnetization vs. temperature measurement. We infer that IBIEC treatment is a useful method not only for the low-temperature annealing of (Ga,Mn)As thin films but also for other dilute magnetic semiconductor (DMS) samples.
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