n-type doping of MCT layers grown by MOVPE (IMP)

J.S. Gough,M.R. Houlton,S.J.C. Irvine,N. Shaw,M.L. Young,A. Royle
DOI: https://doi.org/10.1016/0167-577X(91)90226-V
IF: 3
1991-01-01
Materials Letters
Abstract:Mercury cadmium telluride layers were grown at 350°C by metal organic vapour phase epitaxy (MOVPE) using the interdiffused multilayer process (IMP) and doped with indium or aluminium. Aluminium doping yielded a low electrical activity and displayed large concentration oscillations with the IMP period. This has been attributed to the formation of oxide and carbide inclusions. Indium doping does not display this oscillatory behaviour and the electrical activity was close to 100% after low temperature annealing at concentrations up to 3 × 1017 cm−3.
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