Effect of Ammoniating Temperature on the Quality of GaN Nanostructures on Si Substrates

Yuping Cao,Chengshan Xue,Feng Shi,Haibo Sun,Yongfu Guo,Wenjun Liu
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.01.005
2010-01-01
Abstract:GaN nanostructures were synthesized on Si (111) substrates through ammoniating the Ga2O3/Co films at different temperatures by magnetron sputtering system.The structure,morphology and optical properties of the samples were characterized by X-ray diffraction (XRD),Fourier transform infrared spectroscopy (FTIR),scanning electron microscopy (SEM),high resolution transmission electron microscopy (HRTEM) and photoluminescence (PL).The resuits show that the synthesized GaN nanostructures are of hexagonal wurtzite structure,and the growth of GaN nanostructures is affected greatly by the temperature.The PL results reveal a strong UV emission at 388 nm,which will have a good advantage in applications of low-dimensional laser devices.The growth mechanism was also briefly discussed.
What problem does this paper attempt to address?