Doping Mechanism and Preparing Technology of P-Type ZnO

许积文,王华,任明放,杨玲
DOI: https://doi.org/10.3969/j.issn.1004-244x.2009.03.030
2009-01-01
Abstract:Zinc oxide(ZnO) is considered to be the next generation shorter wavelength semiconductor because of wide band gap and 60 meV exciton binding energy.Researches indicate that n-type ZnO films can be well prepared because of unipolarity of ZnO caused by the intrinsic donor defects.But how to realize p-type ZnO films through doping is the key step,this is due to the high self-compensating process on doping derived from the donor defects and lacking of shallow acceptor doping with smaller solubility.This paper summarized completely the doping mechanism and the effective preparing technology of p-type ZnO films.
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