Structural and Optical Properties of Mn-doped ZnO Thin Films by RF Magnetron Sputtering

ZHANG Huan-huan,LI Zhi,MIAO Chun-yu,MA Chun-yu,ZHANG Qing-yu
2011-01-01
Abstract:Using reactive RF magnetron sputtering,Zn1-xMnxO(0≤x≤0.25) thin films were deposited on Si(001) substrate and were annealed at different temperatures.The microstructural,surface morphological and optical properties of Zn1-xMnxO thin films were characterized by using X-ray diffraction(XRD),atomic force microscopy(AFM),transmission electron microscopy(TEM) and transmittance spectroscopy.The results indicated that all the films are strongly oriented along(002) orientation corresponding to the hexagonal wurtzite structure.The ZnMnO film at concentration x≈0.07 of Mn is of high quality,uniform,and free of clustering/segregated phases.However,at x≤0.13,ZnMnO3(tetragonal) is observed as the secondary phase.For Zn1-xMnxO(x≈0.07) thin films the optical band gap is found to be 3.17 eV for as-deposited and 3.27 eV for annealed at a high temperature.The as-deposited film is in a state of compressive stress and the stress can be largely relieved with annealing temperature of above 700℃.
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