Room-Temperature Ferromagnetic Znmno Thin Films Synthesized by Plasma Enhanced Chemical Vapour Deposition Method

Lin Ying-Bin,Lu Zhi-Hai,Zou Wen-Qin,Lu Zhong-Lin,Xu Jian-Ping,Ji Jian-Ti,Liu Xing-Chong,Wang Jian-Feng,Lv Li-Ya,Zhang Feng-Ming,Du You-Wei,Huang Zhi-Gao,Zheng Jian-Guo
DOI: https://doi.org/10.1088/0256-307x/24/7/082
2007-01-01
Abstract:Room-temperature ferromagnetic Mn-doped ZnO films are grown on Si (001) substrates by plasma enhanced chemical vapour deposition (PECVD). X-ray diffraction measurements reveal that the Zn1-xMnxO films have the single-phase wurtzite structure. X-ray photoelectron spectroscopy indicates the existence of Mn2+ ions in Mn-doped ZnO Elms. Furthermore, the decreasing additional Raman peak with increasing Mn-doping is considered to relate to the substitution of Mn ions for the Zn ions in ZnO lattice. Superconducting quantum interference device (SQUID) measurements demonstrate that Mn-doped ZnO films have ferromagnetic behaviour at room temperature.
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