Analysis of the Electrical Characteristics of the Ag/ZnO Schottky Barrier Diodes on F-doped SnO2 Glass Substrates by Pulsed Laser Deposition

Xin'An Zhang,Fusheng Hai,Ting Zhang,Caihong Jia,Xianwen Sun,Linghong Ding,Weifeng Zhang
DOI: https://doi.org/10.1016/j.mee.2011.12.009
IF: 2.3
2012-01-01
Microelectronic Engineering
Abstract:High quality semiconductor layer of n-type ZnO thin film was fabricated on F-doped SnO2 glass substrates by pulsed laser deposition. The Schottky junction diodes with configuration of Ag/ZnO/FTO have been fabricated to study the devices electrical properties by current–voltage (I–V) and capacitance–voltage (C–V) measurements. The results show that the devices have good rectifying behaviors with an ideality factor of 1.64 and a Schottky barrier height of 0.85eV based on the I–V characteristics. Also, Cheung’s functions and Norde’s method were used to evaluate the I–V characteristics and to obtain the series resistance of the Schottky contact. From the C–V characteristics, the capacitance was determined to increase with decrease of frequencies. C–V measurements have resulted in higher barrier heights than those obtained from I–V measurements. The discrepancy between Schottky barrier heights obtained from I–V and C–V measurements was also interpreted.
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