Sputter-Deposited copper iodide thin film transistors with low Operating voltage

Zachary C. Adamson,Rotem Zilberberg,Iryna Polishchuk,Natalia Thomas,Kyumin Kim,Alexander Katsman,Boaz Pokroy,Alexander Zaslavsky,David C. Paine
DOI: https://doi.org/10.1016/j.sse.2024.109014
IF: 1.916
2024-10-24
Solid-State Electronics
Abstract:This paper reports on a back-gated p-type thin film transistor (TFT) with copper iodide (CuI) as the channel material, a HfO 2 gate dielectric layer, and Al 2 O 3 passivation. The γ-CuI channel was deposited from a CuI target using DC magnetron sputtering at room temperature. Our TFT can be fully shut off by V G = 4 V, with a field-effect channel hole mobility μ h ∼ 1.5–2 cm 2 V −1 s −1 . An anneal in forming gas was performed twice, once at 200 °C, then at 250 °C to improve gate control, yielding a final I on /I off current ratio of ∼ 250. The anneal served two purposes: to reduce the oxygen acceptor density in the CuI channel and reduce the concentration of interface states between the CuI, Al 2 O 3 passivation, and HfO 2 . A model of the device was built in an industrial TCAD simulator, which reproduces the measured characteristics and allows an estimation of interface state densities and channel doping.
physics, condensed matter, applied,engineering, electrical & electronic
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