ON-CHIP INTERCONNECT SIMULATION OF PARASITIC CAPACITANCES IN PERIODIC STRUCTURES

A. Nentchev,S. Selberherr,W. Wessner,R. Sabelka

Abstract:Parasitic capacitances determine significantly the performance of todays complex on-chip interconnect structures. This article handles the implementation of periodic boundary conditions for electrical field calculation and parasitic capacitance extraction in interconnect structures. Various examples show the impact of these convenient boundary conditions.

Engineering,Physics