Welding method of copper target blank and copper alloy backing plate

周友平,姚力军,王学泽
2009-04-20
Abstract:The invention relates to a welding method of a target and a backing plate, comprising the following steps of: providing a copper target blank and a copper alloy backing plate; putting the copper target blank and the copper alloy backing plate in a vacuum can and then conveying to welding equipment; adopting hot isostatic pressing process to conduct diffusion welding, and welding the copper target blank on the copper alloy backing plate to form a target module; and after welding, conducting air cooling, removing the vacuum can and taking out the target module. On one hand, the welding method adopts the vacuum can to separate the target and the backing plate from air, thus effectively preventing the metal surface from being oxidized when in welding and reducing the vacuum equipment cost; on the other hand, the welding method utilizes the hot isostatic pressing process to conduct diffusion welding, thus further improving the bonding strength between the copper target blank and the copper alloy backing plate and leading to small bending deformation after bonding.
Materials Science,Engineering
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