Vanadium-aluminum alloy target and preparation method thereof

徐玄,李巧梅,顾进跃,顾伟华,马辉
2015-06-10
Abstract:The invention provides a vanadium-aluminum alloy target and a preparation method thereof. The target consists of vanadium powder, aluminum powder and a binding agent, wherein the mass ratio of the vanadium powder to the aluminum powder is 19: 1-3: 2; and the purities of the vanadium powder and the aluminum powder are higher than 99.5%. The preparation method comprises the following steps: the vanadium powder and the aluminum powder are weighed out according to a certain proportion, and are fully and uniformly mixed; the binding agent is added in the vanadium powder and the aluminum powder for further uniform mixing to obtain a dry composite powder material of the vanadium and aluminum powders and the binding agent; the plasma spraying operation is performed for the composite powder material in the step (2); and a component obtained by spraying is taken down, and is treated to obtain a finished product. The vanadium-aluminum alloy target is excellent in uniformity and high in stability. The preparation method adopts the plasma spraying mode, is simple and feasible, needs no mold design or expensive pressing equipment, and is convenient to operate; and the prepared target is excellent in sputtering performance, few in impurities and suitable for optical film coating.
Materials Science
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