Electroless Deposition of Confined Copper Layers Based on Selective Activation by Pulsed Laser Irradiation

R. Zhou
DOI: https://doi.org/10.2961/JLMN.2017.02.0021
2017-09-01
Abstract:Copper circuit was successfully fabricated on non-conductive modified polycarbonate (PC) lightweight plastic substrate by pulsed laser ablation. The modified PC plastic embedded with copper nanoparticles provides a possible route for electroless copper deposition. Copper layer can be selectively confined in the area of pulsed laser activation on the PC substrate. Laser ablation can remove the polymeric substrate material with controlled processing parameters and make embedded copper seeds exposed as self-catalytic centers. In this work, the effects of laser power and scanning speed on the electrical performance of deposited copper layer are investigated. Energy Dispersive X-ray (EDX) is employed to analyze the surface chemistry of activated areas. The dynamic process and deposition mechanism of copper layer on PC surface are studied. The resistivity of the copper layer is strongly dependent on laser power and scanning speed. An optimized resistivity of 15 μΩ·cm is achieved.
Materials Science,Engineering,Physics
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