A STUDY OF LASER-ENHANCED ELECTRODEPOSITION PROCESS OF COPPER

XH WANG,HJ ZHOU,ZZ YU
1993-01-01
Acta Chimica Sinica
Abstract:Electrodeposition process of copper under a laser beam has been studied by rotating disk electrode. A laser beam results local temperature rise at electrode-solution interface, thi leads to: local positive shift of rest potential, increase in exchange current i0 and charge transfer coefficient alpha, strong microstirring which raises limiting current density. All these changes enhance electrodeposition rates, thus high-speed selective electroplating can be reached.
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