A CMOS Compatible Aluminum Scandium Nitride-based Ferroelectric Tunnel Junction Memristor

Xiwen Liu,Jeffrey Zheng,Dixiong Wang,Pariasadat Musavigharavi,Eric A. Stach,Roy Olsson III,Deep Jariwala
DOI: https://doi.org/10.48550/arXiv.2012.10019
2021-01-06
Abstract:We report a complementary metal oxide semiconductor (CMOS) technology compatible ferroelectric tunnel junction memristor grown directly on top of a Silicon substrate using a scandium doped aluminum nitride as the ferroelectric layer.
Materials Science,Mesoscale and Nanoscale Physics,Strongly Correlated Electrons,Applied Physics
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