Phase measuring deflectometry for convex aspheric surface measurement

Ziliang Yan,Dahai Li,Xinwei Zhang,Renhao Ge

DOI: https://doi.org/10.1364/ao.504682

IF: 1.9

2024-02-16

Applied Optics

Abstract:Ziliang Yan, Dahai Li, Xinwei Zhang, Renhao Ge This paper introduces what we believe to be a novel approach to accurately measure the shape of convex aspherical surfaces with large slope ... [Appl. Opt. 63, 1583-1589 (2024)]

optics

What problem does this paper attempt to address?

Research on Two Optical Methods for Aspheric Measurement

Zhu Yongjian,Yin Shaohui,Sheng Xiaomin,Tang Kun

DOI: https://doi.org/10.3321/j.issn:1004-132x.2009.03.005

2009-01-01

Abstract:To realize the 3D profilometry,a four-step phase shifting method integrated with fringes projection was adopted.In the fringe-projection profilometry,a computer-simulated fringe patterns was projected on the free-form surface of object and the fringes were captured by the phase-shifting technique.Automatic image-processing software with the proposed DCT-based phase-reconstructing algorithm was developed to reconstruct the continuous phase map from fringe patterns.The final 3D profile of object was obtained from the phase map.The corresponding experiments were conducted independently.In interferometry,a new-type interferometer was proposed,which combined the radial shear interferometer with simultaneous phase-shifting technique.It was based on the optical path with two Jamin glass plates and realized the collection of four frames of fringe patterns according to the principle of polarized light.It can test the full-field surface with different sizes and be free from vibration.The theoretical accuracy of this interferometer can reach 1/100 wavelength.Because it enjoys high anti-Jamming performance,the proposed interferometer can realize the high-precision dynamic measurement of aspheric surface under the common conditions without any vibration-isolated setup.
Measurement of Aspheric Surface

朱勇建 Zhu Yongjian,潘卫清 Pan Weiqing

DOI: https://doi.org/10.3788/LOP47.011202

2010-01-01

Laser & Optoelectronics Progress

Abstract:Aspheric technologies have been introduced widely into numerous areas such as camera,cell phone,DVD,communications,astronomy,military affairs and so on because of its high image quality,compact volume and light weight.In aspheric technologies,a key problem is to test the aspheric surface.The probe-contacting method is the earliest one and has become more and more mature,but it couldn't find a trade-off between high accuracy and high efficiency.The non-contacting methods have also been developed for almost 40 years and many different kinds of non-contacting styles are found.However,it's still difficult to realize high accuracy and efficiency at the same time by using a non-contacting technology.With the development of aspheric manufacturing,it becomes more urgent to reach the goal of high accuracy in an extremely-short time.According to different testing principles,most popular aspheric testing technologies have been discussed and compared in details and their own advantages and disadvantages have been set forth.In the end,the developing directions of aspheric surface testing have been pointed out.
Fast measurement spherical surface and fast patching up aspherical surface

Tianning Cao,Weimin Zheng,Jian Bai,Shuwen Zhou

1998-01-01

Guangxue Jishu/Optical Technique

Abstract:A new upright shop digital spherical wave interferometer was designed. By using the comparison method, once the interferometer is adjusted, it can fast measure many identical aspheric surfaces without any more complex adjustments, and the fringes can be displayed on the monitor screen. And by a using the fringe scanning technique, the ring number N and the local ring number δN will be determined automatically and objectively. Then a using the Aspherics Characteristics Interferogram, the low gradient aspherics can be patched up rapidly initially, then the whole surface is patched up by detecting the phase of each sub aperture. The figure error of the aspherics can also be achieved by aspherical wavefront subtract.
The Position Shifting of Frequency Spectrum of Fourier Transform in the Application of Aspheric Surface Testing

Junmiao Weng,Yongying Yang,Dong Liu,Yibing Shen,Yongmo Zhuo

DOI: https://doi.org/10.1117/12.760148

2008-01-01

Abstract:In the measurement of aspheric surfaces, spatial phase modulation technology is always combined. With a tilt, the linear spatial carrier is introduced to enhance the signal noise ratio (SNR). Then using DFT on the interferogram, after spectrum shifting, the first order spectrum filter and IDFT, the wavefront phase of aspheric surface is obtained. In this paper, the traditional way to introduce spatial carrier, namely that the center of the first order spectrum is positioned on the x axis, is analyzed. This method exist a limitation which may influence the testing result. Thus a new method is put forward here. Make sure the slope of spatial carrier is unvaried, and transfer the first order spectrum to the bisector of x axis and y axis. This change can not only reserve the low frequency components of the first order spectrum, but also keep the high frequency components at a large extent. So in some circumstance, the wavefront phase of aspheric surface with a large PV value can't be recovered accurately by the traditional spatial carrier way, but it can be recovered accurately by the new way. This greatly expands the testing range of wavefront of aspheric surface.
Determination of Aspheric Vertex Radius of Curvature in Non-Null Interferometry

Yongying Yang,Lei Zhang,Tu Shi,Dong Liu,Shiyao Chong,Yibing Shen,Jian Bai

DOI: https://doi.org/10.1364/ao.54.002838

IF: 1.9

2015-01-01

Applied Optics

Abstract:Traditional spherical radius of curvature interferometry is not valid for an aspheric vertex radius of curvature (VROC) due to the obstacle in identifying null positions (cat's eye or confocal position). Simultaneous optimization for multiconfiguration of an interferometer model is proposed to retrieve the actual aspheric VROC from its biased nominal value. This procedure works out the contradiction between VROC deviation and positioning error and even surface figure error, independent of absolute positioning by cat's eye or confocal position. In this method, the aspheric VROC and surface figure can be measured simultaneously, which facilitates the test process remarkably in practical optical shop testing. Furthermore, the parent VROC of a hollow aspheric (annular surface) also can be determined in this method. The performance of the proposed method is validated by experiments.
Study on testing larger asphericity in non-null interferometer - art. no. 68340T

Yongying Yang,Dong Liu,Yibing Shen,Junmiao Weng,Yongmo Zhuo

DOI: https://doi.org/10.1117/12.760144

2008-01-01

Abstract:Optical systems benefit from the use of aspheric surfaces because aspherics provide additional degrees of freedom for aberration control, yielding higher performance while reducing system weight and complexity. But optical designers always avoid to use aspheres with larger asphericity in optical systems mainly for the reason that the test of the steep aspherics requires extraordinary skill of the experimenter and the technical means to reduce the asphericity of the wavefronts that detected by the digital camera. Even though null optics can be adopted to compensate the asphericity of the test wavefront, they are not suitable for many cases. Each aspheric surface requires a unique null optics, which greatly increases a project's complexity, cost and time delay. In this paper, a type of novel lens with large longitude aberration and simple structure is proposed to reduce the asphericity of the wavefronts. The characteristic and the design process of the simple lens are discussed in detail. A comparison between the simple lens and the aplanat with different focus setting is given. Computer simulation shows the simple lens has much more power in reducing asphericity.
The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere - art. no. 68342V

Junmiao Weng,Yongying Yang,Dong Liu,Yibing Shen,Yongmo Zhuo

2008-01-01

Abstract:fIn the measurement of aspheric surfaces, the vertex sphere and the best fit sphere are often used as reference sphere to calculate the non-null compensation deviation. In traditional interferometry, the detected wavefront is equal to twice of the deviation; but it is true only in the null condition or with a certain tolerance in the near null condition. In the non-null condition, when reference spherical wavefront (the best fit sphere in this paper) incidences to the aspheric surface, the rays will not return in the same path but deviate certain angles which cause normal longitudinal aberration. If the normal longitudinal aberration is small enough, for example, much smaller than one wavelength, the wavefront aberration can be equalized to twice of the deviation between the aspheric surface and the reference sphere. However, if the normal longitudinal aberration can not be negligible, the wavefront aberration should not be equalized to twice of the deviation. In this paper, the distribution of the deviation between the aspheric surface and the reference sphere is modeled, and the relationship between the wavefront aberration and the normal longitudinal aberration is discussed. Two paraboloids, one with small asphericity and the other large, are analyzed respectively to compare the different result when whether considering the influence of the normal longitudinal aberration. Computer simulation is also carried out in optical tracing software.
Collimated Phase Measuring Deflectometry

Lei Huang,Tianyi Wang,Corey Austin,Lukas Lienhard,Yan Hu,Chao Zuo,Daewook Kim,Mourad Idir

DOI: https://doi.org/10.1016/j.optlaseng.2023.107882

IF: 5.666

2024-01-01

Optics and Lasers in Engineering

Abstract:Phase measuring deflectometry has been applied for free-form specular surface metrology, but its measured slope results are sensitive to the depth of sample positioning, which is also called the height-slope ambiguity. The objective of this work is to tackle this height-slope ambiguity problem. The main idea is to introduce collimated camera rays using a telecentric imaging lens and collimated structured-light illumination with a Fourier lens. This setup makes the fringe phases become only sensitive to the surface slopes and insensitive to the depth of the sample positioning. In this way, the slope calculation is theoretically independent of the sample depth. We call this new deflectometry technique Collimated Phase Measuring Deflectometry (CPMD). With our developed CPMD experimental setup, the measurement is insensitive to the depth of sample positioning, e.g., the measured height dispersion is less than 30 nm RMS within a 10 mm depth range when measuring a 50-mm-diameter spherical mirror with a 200 mm radius of curvature. The merits and limitations of the proposed CPMD technique are discussed, revealing its prospects in practical metrology applications and potential future investigations.
Correction of Aberration-Induced Phase Errors in Phase Measuring Deflectometry

Xiangchao Zhang,Zhenqi Niu,Junqiang Ye,Min Xu

DOI: https://doi.org/10.1364/ol.415953

IF: 3.6

2021-01-01

Optics Letters

Abstract:Phase measuring deflectometry is a powerful measuring method of complex optical surfaces that captures the reflected fringe images associated with a displaying screen and calculates the normal vectors of the surface under test (SUT) accordingly. The captured images are usually set conjugate to the SUT, which in turn makes the screen defocused. As a result, the blurring effect caused by the defocus and aberrations of the off-axis catadioptric imaging system can severely degrade the phases solved from the blurred images. In order to correct the phase errors, the space-variant point spread functions (PSFs) are modeled using a skew-normal function. The phase bias is estimated by forward convolution between the captured images and the PSF models. Demonstrated with a highly curved aspheric surface, the measurement accuracy can be improved by three times.
3D shape measurement of convex aspheric surface using reverse Hartmann test

Shanshan Wang,Yinlong Hou,Dawei Li,Qiudong Zhu

DOI: https://doi.org/10.1016/j.optcom.2020.125552

IF: 2.4

2020-06-01

Optics Communications

Abstract:<p>Based on the reflection of sinusoidal fringes and their distortions due to surface deviations from the ideal geometry, a method, called the reverse Hartmann test method, for the three-dimensional shape measurement of convex aspheric surfaces was developed. This method has an accuracy comparable to that of interferometry, in addition to its simple structure, low cost, and robustness against environmental turbulence and vibration. The developed method, which is based on the relative geometric position, is free from high-precision physical benchmarks. Furthermore, accurate surface data can be obtained through iterative fitting of Zernike slope polynomials without the need of complex calibration. Implementation of this measurement method will enable solving the problems associated with the measurement of convex aspheric surfaces with high dynamic range, high resolution, and high precision.</p>

optics
Wavefront-coded phase measuring deflectometry for the all-focused measurement

Zhenqi Niu,Junhua Wang,Yuhan Tian,Zhen Wu,Chaoyang Wei,Jianda Shao

DOI: https://doi.org/10.1364/OL.470949

2022-09-15

Abstract:Phase measuring deflectometry is a powerful measuring method for complex optical surfaces, which captures the reflected fringe images encoded on the screen under the premise of focusing the measured specular surface. Due to the limited depth of field of the camera, the captured images and the measured surface cannot be focused at the same time. To solve the position-angle uncertainty issue, in this Letter, the wavefront coding technology is used to modulate the imaging wavefront of the deflectometry, thereby making the measuring system insensitive to the defocus and other low-order aberration including astigmatism, field curvature, and so on. To obtain the accurate phase, the captured fringe images are deconvoluted using the modulated point spread function to reduce the phase error. Demonstrated with a highly curved spherical surface, the measurement accuracy can be improved by four times. Experiments demonstrate that the proposed method can successfully reconstruct the complex surfaces defocusing the captured images, which can greatly release the focusing requirement and improve measurement accuracy.
Simultaneous Measurement of Double Surfaces of Transparent Lenses with Phase Measuring Deflectometry

Junqiang Ye,Zhenqi Niu,Xiangchao Zhang,Wei Wang,Min Xu

DOI: https://doi.org/10.1016/j.optlaseng.2020.106356

IF: 5.666

2021-01-01

Optics and Lasers in Engineering

Abstract:The phase measuring deflectometry is a promising method for the high precision measurement of optical freeform surfaces. However, it fails to measure the double surfaces of transparent lenses, because the fringes reflected from both the upper and the lower surfaces are superimposed in the captured images. An effective method is proposed to solve this problem by displaying a set of fringe patterns with different frequencies and retrieving the fringe phases associated with both surfaces. The form of the lower surface is reconstructed using a hybrid reflection-refraction model. Experimental results demonstrate that the proposed method can reliably reconstruct both surfaces of a lens, making deflectometry capable of measuring transparent optics with high accuracy.
Angular phase-shifting interferometry for surface shapes measurement using vortex beam

Dong Yang,Yanfeng Zhang,Zhongming Yang

DOI: https://doi.org/10.1016/j.optlaseng.2023.107600

IF: 5.666

2023-07-01

Optics and Lasers in Engineering

Abstract:We proposed a novel optical surface shapes measurement method based on conformal mapping-angular phase-shifting interferometry (APSI). This method rotates a Q-plate in the reference light path to introduce a 90-degree phase shift. The mathematical tool of conformal mapping is used for surface shape demodulation. After removing the helical phase in the compound phase, high-precision surface shape measurement results are obtained, and the measurement surface shape deviations are 3.33 nm (PV) and 0.26 nm (RMS). This work paves the way for surface shape measurement and compound phase demodulation using vortex beams.

optics
Interferometric Spherical Surface Testing with Unknown Phase Shifts

Fa Zeng,Qiaofeng Tan,Mingzhao He,Yanhui Kang,Huarong Gu,Zhehai Zhou,Guofan Jin

DOI: https://doi.org/10.1364/oe.23.014360

IF: 3.8

2015-01-01

Optics Express

Abstract:A general method is presented for spherical surface testing with unknown phase shifts based on a physical model of the interferometer cavity, which describes the phase shifts taking into account the rigid cavity motions and the radial imaging distortion of the interferometer. The captured interferograms are processed frame by frame with the regularized frequency-stabilizing method, so as to get the phase shifts between the frames. These phase shift data are subsequently fitted, and the initial estimations for the wavefront, direct current and interference contrast terms are calculated by the least-squares method. Specially, a simple way is proposed to find reasonable initial guess for numerical aperture (NA) of the test beam (when NA is unknown), so as to ensure the effectiveness of the above phase shift fitting procedure. Then, the wavefront result is further refined in an iterative way, by fitting the sequence of interferograms to the physical model of the interferometer cavity with the linear regression technique. Finally, the wavefront result related to the actual surface profile is retrieved after removing the aberrations due to the surface misalignment and the imaging distortion. Both simulations and experiments with the ZYGO interferometer have been carried out to validate the proposed method, with experimental accuracies better than 0.004λ RMS achieved. The proposed method provides a feasible way to spherical surface testing without the use of any phase-shifting devices, while retaining good accuracy and robust convergence performance.
Simulation of Convex Aspherical Surface Testing with Partial Compensating Interferometer

Yao Hu,Shaopu Wang,Jingxian Wang,Yan Ning,Xuemin Cheng,Qun Hao

DOI: https://doi.org/10.2991/icemie-16.2016.76

2016-01-01

Abstract:Large aperture convex aspheric optical components are widely used in imaging systems such as astronomy and space telescopes. Measurement of the figure error of the convex aspherical surface with high precision has been a challenge. We have proposed partial compensating interferometry with catadioptric compensating lens to solve the measurement of convex aspherical surface. In this paper, we dig into the problem of retrace error correction and verify the whole measurement process. We do simulation experiment to measure the wavefront at the exit pupil with digital Moire phase-shifting technique. And then we do iterative optimization to calculate the figure error and correct the retrace error. The feasibility and accuracy has been demonstrated, which lays the theoretical foundation for the practical measurement.
Transition imaging phase measuring deflectometry for high-precision measurement of optical surfaces

Yunuo Chen,Xiangchao Zhang,Ting Chen,Rui Zhu,Lu Ye,Wei Lang

DOI: https://doi.org/10.1016/j.measurement.2022.111589

IF: 5.6

2022-01-01

Measurement

Abstract:• The transition imaging phase measuring deflectometry is proposed to overcome the convolution effect caused by the screen defocusing. • The screen and the surface under test can be focused at the same time to physically overcome the “position-angle uncertainty” problem. • The geometrical calibration of the measurement system requires only one-shot. • The measurement accuracy is improved by 5.8 times compared with the conventional method. The phase measuring deflectometry is a powerful measuring method for optical freeform surfaces, but the surface under test (SUT) and the screen pattern cannot be in-focus simultaneously. The defocusing of the screen in the imaging system can cause serious convolution effect. Then the mismatching errors arising in the phase demodulation will reduce the measurement accuracy. To solve this problem, the transition imaging phase measuring deflectometry is proposed. An auxiliary focusing mirror is applied to image the screen pattern to the position of the SUT, so that the camera can clearly capture the images of the screen pattern and the SUT at the same time. The system design, the geometrical calibration, and the fast solving method of the gradient field are developed. Finally, the measurement accuracy of the proposed method is experimentally demonstrated and it can be improved by 5.8 times when measuring complex surfaces.
Phase calculation of smooth surface with multi-reflectivity based on phase measurement deflectometry.

Yan Xie,Xiaohao Wang,Qian Zhou

DOI: https://doi.org/10.1364/OE.511045

IF: 3.8

2024-01-01

Optics Express

Abstract:With the continuous advancement of precision machining technology and the growing demand for products, increasingly complex objects with high reflectivity are becoming more prevalent in production and daily life. phase measurement deflectometry (PMD) is a technique that utilizes a surface light source to project structured light for comprehensive detection of highly reflective surfaces. It offers advantages such as high accuracy, fast speed, low cost, and non-contact operation. However, when the surface of the object being measured has varying levels of reflectivity, this method may produce errors due to significant differences in fringe contrast between different reflective areas. In order to enable the fringe deflection system to simultaneously detect multiple reflective objects without sacrificing accuracy, this paper proposes an adaptive method for fringe generation detection. This method can adaptively adjust the intensity based on the reflectivity of the measured surface and compensate for the light at the reflectivity boundary, ultimately achieving phase calculation for multiple reflective surfaces.
Error compensation for near optical coaxial phase measuring deflectometry with refraction error model

Yanling Li,Zonghua Zhang,Yongjia Xu,Feng Gao,Ruiyang Wang,Yang Yu,Nan Gao,Zhaozong Meng,Xiangqian Jiang

DOI: https://doi.org/10.1364/oe.520849

IF: 3.8

2024-05-30

Optics Express

Abstract:Yanling Li, Zonghua Zhang, Yongjia Xu, Feng Gao, Ruiyang Wang, Yang Yu, Nan Gao, Zhaozong Meng, Xiangqian Jiang Phase measuring deflectometry (PMD) is a key measurement technology for specular surfaces form measurement. Compared with conventional PMD ... [Opt. Express 32, 21577-21593 (2024)]

optics
Aspheric Surface Measurement Using Moire Deflectometry Based On Digital Fourier Transform

Bx Wang,Xz Luo,T Pfeifer,H Mischo

1999-01-01

Abstract:Moire ddeflectometry is technique combining Talbot effect with moire technique for measuring and testing phase objects or reflective surfaces. Moire deflectogram provided by light deflection from tested phase object or reflective surface can be used to calculate the deflection angle which represents the reflective index of the phase object or the height of reflective surface. A moire deflectometric measurement of aspheric surface using Digital Fourier Transform method is described in this paper. The experimental set-up of a moire deflectometer is of the form of a Kepler telescope for obtaining magnified images. For the first time the Digital Fourier Transform (DFT) is employed to process moire deflectograms. Phase-shifting technique is also used in data acquisition. The theory for combing Fourier Transform with phase-shifting is presented in the paper, and the equations for phase calculation for both infinite and finite moire deflectograms are deducted. Moire deflectograms in both x and y directions are acquired and processed by means of DFT method and integrated to reconstruct the profile of the measured surface. Moire deflectometry with phase-shifting and DFT has the advantages in simple stet-up and high measuring accuracy. Since only the spatial coherence is required in moire deflectometry, the set-up has a strong capability against mechanical interference and a good stability.
An improved phase retrieval algorithm for optical aspheric surface measurement

Yulie Wu,Lingyan Ding,Xiaojun Hu

DOI: https://doi.org/10.1016/j.optcom.2010.11.039

IF: 2.4

2011-03-01

Optics Communications

Abstract:In order to overcome the measurement and calculation difficulty for aspheric surface with phase retrieval technology, an improved phase retrieval algorithm was proposed. Due to significant departure from sphere surface, reflected light from different part of the aspheric surface under test will overlap in some areas in the collected images by CCD with general phase retrieval measurement setup, which will lead to the failure to recover the surface phase. The proposed algorithm will only use those areas without light overlapping in each image in the iteration process and employ several defocused images to recover the whole surface. This algorithm can improve the measurement range for aspheric surface with phase retrieval technology. The experimental system was established and a 180mm diameter, f/1.6 parabolic mirror and a 180mm effective diameter, f/1.33 hyperboloid mirror were tested by the proposed method. The experimental results show that the retrieved surface errors are in good consistent with that obtained by interferometer, which confirms the validity of the proposed algorithm.

optics

Phase measuring deflectometry for convex aspheric surface measurement

Research on Two Optical Methods for Aspheric Measurement

Measurement of Aspheric Surface

Fast measurement spherical surface and fast patching up aspherical surface

The Position Shifting of Frequency Spectrum of Fourier Transform in the Application of Aspheric Surface Testing

Determination of Aspheric Vertex Radius of Curvature in Non-Null Interferometry

Study on testing larger asphericity in non-null interferometer - art. no. 68340T

The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere - art. no. 68342V

Collimated Phase Measuring Deflectometry

Correction of Aberration-Induced Phase Errors in Phase Measuring Deflectometry

3D shape measurement of convex aspheric surface using reverse Hartmann test

Wavefront-coded phase measuring deflectometry for the all-focused measurement

Simultaneous Measurement of Double Surfaces of Transparent Lenses with Phase Measuring Deflectometry

Angular phase-shifting interferometry for surface shapes measurement using vortex beam

Interferometric Spherical Surface Testing with Unknown Phase Shifts

Simulation of Convex Aspherical Surface Testing with Partial Compensating Interferometer

Transition imaging phase measuring deflectometry for high-precision measurement of optical surfaces

Phase calculation of smooth surface with multi-reflectivity based on phase measurement deflectometry.

Error compensation for near optical coaxial phase measuring deflectometry with refraction error model

Aspheric Surface Measurement Using Moire Deflectometry Based On Digital Fourier Transform

An improved phase retrieval algorithm for optical aspheric surface measurement