Error compensation for near optical coaxial phase measuring deflectometry with refraction error model

Yanling Li,Zonghua Zhang,Yongjia Xu,Feng Gao,Ruiyang Wang,Yang Yu,Nan Gao,Zhaozong Meng,Xiangqian Jiang
DOI: https://doi.org/10.1364/oe.520849
IF: 3.8
2024-05-30
Optics Express
Abstract:Yanling Li, Zonghua Zhang, Yongjia Xu, Feng Gao, Ruiyang Wang, Yang Yu, Nan Gao, Zhaozong Meng, Xiangqian Jiang Phase measuring deflectometry (PMD) is a key measurement technology for specular surfaces form measurement. Compared with conventional PMD ... [Opt. Express 32, 21577-21593 (2024)]
optics
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