Simulation of Convex Aspherical Surface Testing with Partial Compensating Interferometer

Yao Hu,Shaopu Wang,Jingxian Wang,Yan Ning,Xuemin Cheng,Qun Hao
DOI: https://doi.org/10.2991/icemie-16.2016.76
2016-01-01
Abstract:Large aperture convex aspheric optical components are widely used in imaging systems such as astronomy and space telescopes. Measurement of the figure error of the convex aspherical surface with high precision has been a challenge. We have proposed partial compensating interferometry with catadioptric compensating lens to solve the measurement of convex aspherical surface. In this paper, we dig into the problem of retrace error correction and verify the whole measurement process. We do simulation experiment to measure the wavefront at the exit pupil with digital Moire phase-shifting technique. And then we do iterative optimization to calculate the figure error and correct the retrace error. The feasibility and accuracy has been demonstrated, which lays the theoretical foundation for the practical measurement.
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