Dimensional Scaling of Ferroelectric Properties of Hafnia-Zirconia Thin Films: Electrode Interface Effects

Fei Huang,Balreen Saini,Lei Wan,Haidong Lu,Xiaoqing He,Shengjun Qin,Wilman Tsai,Alexei Gruverman,Andrew C. Meng,H.-S. Philip Wong,Paul C. McIntyre,Simon Wong
DOI: https://doi.org/10.1021/acsnano.4c01992
IF: 17.1
2024-06-27
ACS Nano
Abstract:Hafnia-based ferroelectric (FE) thin films are promising candidates for semiconductor memories. However, a fundamental challenge that persists is the lack of understanding regarding dimensional scaling, including thickness scaling and area scaling, of the functional properties and their heterogeneity in these films. In this work, excellent ferroelectricity and switching endurance are demonstrated in 4 nm-thick Hf(0.5)Zr(0.5)O(2) (HZO) capacitors with molybdenum electrodes in capacitors as small...
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry, physical
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