Measurement of the variable surface charge concentration in gallium nitride and implications on device modeling and physics

E. Ber,B. Osman,D. Ritter
DOI: https://doi.org/10.1109/TED.2019.2901869
2019-02-23
Abstract:We have evaluated the density of interface trap states (Dit) at the surface of a GaN/AlGaN/GaN heterojunction by the previously described gated van der Pauw experiments, as well as by a UV assisted gated van der Pauw method, described in this article. The obtained Dit values are about two orders of magnitude lower than assumed by the surface-donor theory and three orders of magnitude lower than required to compensate the polarization surface charge in GaN. Previous experimental studies using a variety of other techniques reported similarly low Dit values. We hence conclude that variable midgap surface-charge is not responsible for the formation of the two-dimensional electron gas, and cannot compensate for the large surface polarization charge in GaN. A yet unexplained polarization self-compensating (PSC) surface charge must be invoked to account for experiments. A few comments about the physical nature of the proposed PSC charge are provided.
Materials Science
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