Abstract:Good electronic (Rs = ∼5 Ω sq-1) and optical properties (transmittance: >83%) make indium tin oxide (ITO) an attractive electrode substrate. Despite the commercial availability of high-quality ITO and some low-cost methods for direct deposition being in use by now, the definition of patterns is still a concern. Putting their popularity and extensive use aside, the manufacturing of ITO electrodes so far lacks a rapid, highly reproducible, flexible, cost-effective, easy patterning process that could surpass difficult, time-consuming techniques such as lithography. Herein, we present a low-cost method based on CO2 laser irradiation for preparing ITO microelectrodes and electrode arrays. Electrodes of different sizes and shapes were examined to identify the performance of the proposed methods. Direct ablation of the ITO layer was optimized for rectangular electrodes of 25, 50, and 100 μm in width, while laser cutting of scotch tape stencils and subsequent wet etching were used to create circular electrodes with a diameter of 1.75 mm. A multielectrode array system consisting 8 of these circular electrodes was fabricated on a (25 × 25) mm2 plate, characterized electrochemically through cyclic voltammetry (CV) and scanning electrochemical microscopy (SECM), and as an example application used for monitoring the anchoring behavior of HeLa and HepG2 cell cultures through cell-based electrochemical impedance spectroscopy. Together, the direct ablation method and preparation of laser cut stencils form a complete toolbox, which allows for low-cost and fast fabrication of ITO electrodes for a wide variety of applications. To demonstrate the general availability of the method, we have also prepared a batch of electrodes using a laser plotter in a local printing shop, achieving high intra-workshop reproducibility.

Fabrication of implantable microelectrode arrays by laser cutting of silicone rubber and platinum foil

Rapid prototyping and facile customization of conductive hydrogel bioelectronics based on all laser process

Microfabricated bioelectrodes on self-expandable NiTi thin film devices for implants and diagnostic instruments

Low-cost and versatile integration of microwire electrodes and optical waveguides into silicone elastomeric devices using modified xurographic methods

A Simple and Low-Cost Method to Fabricate Flexible Microelectrodes for Neural Applications

Fabrication and Characterization of Platinum-Iridium Electrodes with Micro-Structured Surfaces For Neural Stimulation Applications

Design and Microfabrication Considerations for Reliable Flexible Intracortical Implants

Fabrication of ITO microelectrodes and electrode arrays using a low-cost CO2 laser plotter

A Flexible Microneedle Electrode Array with Solid Silicon Needles

Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

Fabrication and evaluation of an improved polymer-based cochlear electrode array for atraumatic insertion

Fabrication of Flexible 3D Microelectrode Aray with Parylene-Based Pattern Transfer Technique

A Facile Approach for Rapid Prototyping of Microneedle Molds, Microwells and Micro-Through-Holes in Various Substrate Materials Using CO2 Laser Drilling

Laser-fabrication of neural electrode arrays with sputtered iridium oxide film

Study on Fabrication Method of Implantable and Flexible Double-side Microelectrodes for Neural Applications

Key Design of Flexible Neural Microelectrode Arrays and Its Microfabrication Process

Micro injection molding of individualised implants using 3D printed molds manufactured via digital light processing

Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface

Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis

Fabrication and validation of flexible neural electrodes based on polyimide tape and gold sheet

Printed Stretchable Liquid Metal Electrode Arrays for In Vivo Neural Recording