Abstract:Color-center defects in silicon carbide promise opto-electronic quantum applications in several fields, such as computing, sensing and communication. In order to scale down and combine these functionalities with the existing silicon device platforms, it is crucial to consider SiC integrated optics. In recent years many examples of SiC photonic platforms have been shown, like photonic crystal cavities, film-on-insulator waveguides and micro-ring resonators. However, all these examples rely on separating thin films of SiC from substrate wafers. This introduces significant surface roughness, strain and defects in the material, which greatly affects the homogeneity of the optical properties of color centers. Here we present and test a method for fabricating monolithic single-crystal integrated-photonic devices in SiC: tuning optical properties via charge carrier concentration. We fabricated monolithic SiC n-i-n and p-i-n junctions where the intrinsic layer acts as waveguide core, and demonstrate the waveguide functionality for these samples. The propagation losses are below 14 dB/cm. These waveguide types allow for addressing color-centers over a broad wavelength range with low strain-induced inhomogeneity of the optical-transition frequencies. Furthermore, we expect that our findings open the road to fabricating waveguides and devices based on p-i-n junctions, which will allow for integrated electrostatic and radio frequency (RF) control together with high-intensity optical control of defects in silicon carbide.

Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films

Fabrication of Optical Cavities with Femtosecond Laser Pulses

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Photonic crystal cavities in silicon dioxide

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

High-Q Photonic Crystal Nanobeam Cavities on Silicon

Silicon Coupled Cavities As a Flexible Platform for Integrated Nonlinear Photonics

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

Modeling and Characterization of Tunable Photonic Crystal Waveguides Based on Two-Dimensional Periodic Arrays of Silicon Pillars

High-Q-factor nanobeam photonic crystal cavities in bulk silicon carbide

Silicon Carbide Photonic Crystal Cavities with Integrated Color Centers

Design and Fabrication of High-Quality Two-Dimensional Silicon-Based Photonic Crystal Optical Cavity with Integrated Waveguides

Broadband single-mode planar waveguides in monolithic 4H-SiC

Silicon photonic crystal cavities at near band-edge wavelengths

High-Q Photonic Crystal Microcavities

High Quality Factor in A Two-Dimensional Photonic Crystal Cavity on Silicon-On-Insulator

Quantum photonics in triangular-cross-section nanodevices in silicon carbide

Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides

Novel Photonic Applications of Silicon Carbide

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Design and Characterization of Line-Defected Silicon Waveguide and High-Q Optical Cavity