Abstract:Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinement and manipulation. As such, they are becoming attractive for the design of novel resonance-based photonic integrated circuits (PICs). Here two essential challenges arise however - how to realize ultrahigh-Q PhC cavities using standard fabrication processes compatible with large volume fabrication, and how to efficiently integrate them with other standard building blocks, available in exiting PIC platforms. In this work, we demonstrate ultrahigh-Q 1D PhC nanocavities fabricated on a 300 mm SOI wafer by optical lithography, with a record Q factor of up to 0.84 million. Moreover, we show efficient mode management in those oxide embedded cavities by coupling them with an access waveguide and realize two critical components: notch filters and narrow-band reflectors. In particular, they allow both single-wavelength and multi-wavelength operation, at the desired resonant wavelengths, while suppressing all other wavelengths over a broad wavelength range (>100 nm). Compared to traditional cavities, this offers a fantastic strategy for implementing resonances precisely in PIC designs with more freedom in terms of wavelength selectivity and the control of mode number. Given their compatibility with optical lithography and compact footprint, the realized 1D PhC nanocavities will be of profound significance for designing compact and novel resonance-based photonic components on large scale.

Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides

Fabrication of Optical Cavities with Femtosecond Laser Pulses

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Finite-Element Method Simulations of High-Q Nanocavities with 1D Photonic Bandgap

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Photonic crystal cavities in silicon dioxide

Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Silicon optical waveguides using photonic bandgap for bioparticle sensing

High-Q Antisymmetric Multimode Nanobeam Photonic Crystal Cavities in Silicon Waveguides

High-Q Photonic Crystal Microcavities

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

Modeling and Characterization of Tunable Photonic Crystal Waveguides Based on Two-Dimensional Periodic Arrays of Silicon Pillars

High-Q Photonic Crystal Nanobeam Cavities on Silicon

Efficient numerical method for analyzing optical bistability in photonic crystal microcavities

Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films

Breaking the Q-S Limitation Between the Fundamental and High Order Modes on Multimode Silicon Photonic Crystal Nanobeam Cavity

Fine Tuning Resonant Frequencies for a Single Cavity Defect in Three-Dimensional Layer-by-layer Photonic Crystal.

Silicon microcavity arrays with open access and a finesse of half a million