G. Wachter,S. Kuhn,S. Minniberger,C. Salter,P. Asenbaum,J. Millen,M. Schneider,J. Schalko,U. Schmid,A. Felgner,D. Hüser,M. Arndt,M. Trupke
Abstract:Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms or nano-scale objects. Many of these applications benefit from strong mode confinement and high optical quality factors, making small mirrors of high surface-quality desirable. Building such devices in silicon yields ultra-low absorption at telecom wavelengths and enables integration of micro-structures with mechanical, electrical and other functionalities. Here, we push optical resonator technology to new limits by fabricating lithographically aligned silicon mirrors with ultra-smooth surfaces, small and wellcontrolled radii of curvature, ultra-low loss and high reflectivity. We build large arrays of microcavities with finesse greater than F = 500,000 and a mode volume of 330 femtoliters at wavelengths near 1550 nm. Such high-quality micro-mirrors open up a new regime of optics and enable unprecedented explorations of strong coupling between light and matter.
What problem does this paper attempt to address?
The main problem this paper attempts to address is the fabrication of silicon microcavity arrays with high optical quality factors (high finesse) and small mode volumes. Specifically, the authors have prepared silicon micromirrors with ultra-smooth surfaces, small and controllable radii of curvature, low loss, and high reflectivity through photolithographic alignment techniques, and constructed microcavity arrays with a finesse exceeding 500,000. These microcavities have a mode volume of 330 femtoliters at a wavelength near 1550 nanometers, enabling unprecedented exploration of strong coupling interactions between light and matter.
Additionally, the paper addresses the following specific issues:
1. **Compactness and Integrability of Microcavities**: Achieved through microfabrication techniques, the compact design of the microcavities allows for large-scale production and integration while maintaining optimal performance.
2. **Low Loss and High Reflectivity**: By optimizing etching processes and coating techniques, extremely low surface roughness and high reflectivity were achieved, thereby reducing photon loss.
3. **Precise Alignment and Geometric Design**: Through precise photolithographic microfabrication techniques, accurate alignment and geometric design of the microcavities were achieved, avoiding edge shear losses.
4. **Low Birefringence**: By optimizing the manufacturing process of the micromirrors, low birefringence was achieved, resulting in a very small phase difference between different polarization states of the light field.
These solutions provide a foundation for various applications, including atomic clocks, molecular spectroscopy, single-photon generation, nanoparticle cooling, and detection.