Abstract:Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms or nano-scale objects. Many of these applications benefit from strong mode confinement and high optical quality factors, making small mirrors of high surface-quality desirable. Building such devices in silicon yields ultra-low absorption at telecom wavelengths and enables integration of micro-structures with mechanical, electrical and other functionalities. Here, we push optical resonator technology to new limits by fabricating lithographically aligned silicon mirrors with ultra-smooth surfaces, small and wellcontrolled radii of curvature, ultra-low loss and high reflectivity. We build large arrays of microcavities with finesse greater than F = 500,000 and a mode volume of 330 femtoliters at wavelengths near 1550 nm. Such high-quality micro-mirrors open up a new regime of optics and enable unprecedented explorations of strong coupling between light and matter.

Fabrication of mirror templates in silica with micron-sized radii of curvature

Fabrication of Optical Cavities with Femtosecond Laser Pulses

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

A New Route for Fabricating Polymer Optical Microcavities.

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Silicon microcavity arrays with open access and a finesse of half a million

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

A small mode volume tunable microcavity: development and characterization

Narrow-linewidth Fano microcavities with resonant subwavelength grating mirror

Optical Nanofabrication of Concave Microlens Arrays

Fabrication of Precision Hemispherical Mirrors for Quantum Optics Applications

A Sub-$\rm λ^{3}$-Volume Cantilever-based Fabry-Pérot Cavity

Fabrication of curved mirrors for visible semiconductor lasers using electron-beam lithography and chemically assisted ion-beam etching

Laser Writing of Parabolic Micromirrors with a High Numerical Aperture for Optical Trapping and Rotation

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser

High reflectivity high-Q micromechanical Bragg mirror

High finesse opto-mechanical cavity with a movable thirty-micron-size mirror

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Optimized single-shot laser ablation of concave mirror templates on optical fibers

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces