The effect of structural parameters on AlGaN solar-blind metal–semiconductor-metal (MSM) photodetectors

Fuxue Wang,Zhong Wang,Shengyao Fan,Meng Li
DOI: https://doi.org/10.1007/s11082-021-03323-x
IF: 3
2021-11-02
Optical and Quantum Electronics
Abstract:We have successfully fabricated the AlGaN-based solar blind ultraviolet (UV) metal–semiconductor–metal (MSM) photodetectors with a high Al-content of 0.6. The photodetectors exhibit a cutoff wavelength of ~ 250 nm corresponding to the bandgap of Al0.6Ga0.4 N. Moreover, a comparative study on the Al0.6Ga0.4 N MSM photodetectors with different structural parameters (active area, finger/spacing size) at room- and high-temperature has been conducted. The effect of the structural parameters on the breakdown voltages, spectral responsivity, dark- and photo-current of Al0.6Ga0.4 N MSM solar-blind UV photodetectors has been systematically explored.
engineering, electrical & electronic,optics,quantum science & technology
What problem does this paper attempt to address?