Abstract:We demonstrate that a near-field microwave microscope based on a transmission line resonator allows imaging in a substantially wide range of frequencies, so that the microscope properties approach those of a spatially-resolved impedance analyzer. In the case of an electric probe, the broadband imaging can be used in a direct fashion to separate contributions from capacitive and resistive properties of a sample at length scales on the order of one micron. Using a microwave near-field microscope based on a transmission line resonator we imaged the local dielectric properties of a Focused Ion Beam (FIB) milled structure on a high-dielectric-constant Ba_{0.6}Sr_{0.4}TiO_3 (BSTO) thin film in the frequency range from 1.3 GHz to 17.4 GHz. The electrostatic approximation breaks down already at frequencies above ~10 GHz for the probe geometry used, and a full-wave analysis is necessary to obtain qualitative information from the images.

Quantitative imaging of dielectric permittivity and tunability with a near-field scanning microwave microscope

High Frequency Dielectric Properties Distribution of Bifeo3 Thin Film Using Near-Field Microwave Microscopy

Quantitative Microwave Near-Field Microscopy of Dielectric Properties

Broadband dielectric microwave microscopy on $μ$m length scales

Local Permittivity Measurement of Dielectric Materials Based on the Non-Contact Force Curve of Microwave Atomic Force Microscopy

High Spatial Resolution Quantitative Microwave Impedance Microscopy by a Scanning Tip Microwave Near-Field Microscope

Quantitative Microscopy Of Nonlinear Dielectric Constant Using A Scanning Evanescent Microwave Microscopy

Superconducting Material Diagnostics using a Scanning Near-Field Microwave Microscope

Quantitative topographic imaging using a near-field scanning microwave microscope

Parameter-free extraction of Thin-Film Dielectric Constants from Scanning Near Field Microwave Microscope Measurements

Quantitative Evaluation of Local Permittivity of Semiconductor Nanomaterials Using Microwave Atomic Force Microscopy

Quantitative Nonlinear Dielectric Microscopy of Periodically Polarized Ferroelectric Domains

Dielectric microscopy with submillimeter resolution

Measurement of Complex Permittivity in Microwave Frequency of Thin Film Materials

Penetrative Imaging Of Sub-Surface Microstructures With A Near-Field Microwave Microscope

Nondestructive Imaging of Periodic Profiles of Dielectric Constant and Ferroelectric Domains Using a Scanning Tip Microwave Near-Field Microscope

Quantitative Microwave Evanescent Microscopy

Noncontact Measurement of Complex Permittivity of Electrically Small Samples at Microwave Frequencies

Atomic-force-microscope-compatible Near-Field Scanning Microwave Microscope with Separated Excitation and Sensing Probes

Nondestructive Imaging of the Microwave Properties of Superconducting Thin Film Devices with a Scanning Microwave Near-Field Microscope

Nondestructive Imaging of Dielectric-Constant Profiles and Ferroelectric Domains with a Scanning-Tip Microwave Near-Field Microscope